✦ LIBER ✦

Center embossed diaphragm design guidelines and Fabry–Perot diaphragm fiber optic sensor

✍ Scribed by Yan Sun; Ganhua Feng; George Georgiou; Edip Niver; Karen Noe; Ken Chin

Book ID: 104051456
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 679 KB
Volume: 39
Category: Article
ISSN: 0026-2692
DOI: 10.1016/j.mejo.2007.12.020

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The design guidelines for micro diaphragm-type pressure sensors have been established by characterization of the relationships among diaphragm thickness, side length, sensitivity, and resonant frequency. According to the study, the thickness need to be thin and the side length need to be small in or