✦ LIBER ✦
CD control of direct versus complementary exposure for shaped beam writers and its correlation to the local registration error
✍ Scribed by F. Thrum; K.-H. Choi; T. Lutz; C. Hohle; C. Arndt; M. Tesauro; M.-T. Bootsmann; J. Kretz
- Book ID
- 108207732
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 159 KB
- Volume
- 84
- Category
- Article
- ISSN
- 0167-9317
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