CBE growth of GaAs/GaAlAs HBTs using the new DEAlH-NMe3 precursor and all-gaseous dopants

✍ Scribed by P.A. Lane; C.R. Whitehouse; T. Martin; M. Houlton; G.M. Williams; A.G. Cullis; S.S. Gill; J.R. Dawsey; G. Ball; B.T. Hughes; M.A. Crouch; M.B. Allenson

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 558 KB
• Volume: 120
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(92)90398-3