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Cathodoluminescence study of off-stoichiometry and residual stresses in advanced dielectrics and related devices

✍ Scribed by Leto, Andrea ;Pezzotti, Giuseppe


Book ID
105365947
Publisher
John Wiley and Sons
Year
2011
Tongue
English
Weight
455 KB
Volume
208
Category
Article
ISSN
0031-8965

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✦ Synopsis


Abstract

The mechanical properties and the functional behavior of inorganic dielectric materials strongly depend on the stoichiometry imbalance in the material and its structural accommodation. Point defect populations are responsible for departures from the normal stoichiometric formula and clear correlations have been documented between the magnitude of the dielectric constant of a compound and the structural mode by which it accommodates its non‐stoichiometry. In this study, we systematically apply the cathodoluminescence (CL) method to local stoichiometry characterizations of advanced silica and barium titanate compounds as paradigm inorganic dielectric materials with amorphous and nanocrystalline structure, respectively. The CL spectral emission is shown here capable not only to clarify the off‐stoichiometric characteristics of dielectric devices, but also to provide a useful probe for assessing the local stress state at the interfaces between the dielectric and the conductor materials.