Cathodoluminescence of SiOxunder-stoichi
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Salh, Roushdey ;von Czarnowski, A. ;Zamoryanskaya, M. V. ;Kolesnikova, E. V. ;Fi
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Article
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2006
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John Wiley and Sons
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English
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## Abstract Underβstoichiometric thin silica layers SiO~__x__~ with different stoichiometric degree 1 β€ __x__ β€ 2, were prepared by thermal evaporation of silicon monoxide in vacuum and in ambient oxygen atmosphere of various pressure onto crystalline silicon substrates. The chemical composition h