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Cathodoluminescence attachment to an electron probe instrument

✍ Scribed by Yacobi, B. G. ;Herrington, C. R.

Publisher: Wiley (John Wiley & Sons)
Year: 1986
Tongue: English
Weight: 356 KB
Volume: 3
Category: Article
ISSN: 0741-0581
DOI: 10.1002/jemt.1060030306

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✦ Synopsis

A simple cathodoluminescence (CL) attachment to a JEOL JSM-840 scanning electron microscope (SEM) is described. It is based on a Si photodiode mounted inside the SEM chamber. The current amplifier of a backscattered electron detector unit, which is a standard feature of this SEM, is used to amplify and display the CL images. Examples of CL panchromatic (integral) images of GaAs, InP, and ZnS crystals are presented.

Cathodoluminescence, GaAs, InP, ZnS

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