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Cathode sputtering of niobium and its alloys in a helium glow discharge

✍ Scribed by D. M. Skorov; B. A. Kalin; V. B. Volkov; P. I. Kartsev; N. M. Kirilin

Publisher: Springer US
Year: 1975
Tongue: English
Weight: 267 KB
Volume: 38
Category: Article
ISSN: 1573-8205
DOI: 10.1007/bf01130955

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