Local Kinetic Modeling of Aluminum Oxide
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Hugues Vergnes; Diane SamΓ©lor; Alain N. Gleizes; Constantin Vahlas; Brigitte Cau
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Article
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2011
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John Wiley and Sons
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English
β 178 KB
A numerical model for the MetalOrganic CVD of alumina from aluminium triβisopropoxide (ATI), based on an apparent heterogeneous kinetic law was developed using the Computational Fluid Dynamics (CFD) code Fluent. The kinetic parameters were fitted from experimental deposition rates obtained between 3