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Catalysis and Pore Initiation in the Anodic Dissolution of Silicon in HF

โœ Scribed by Kooij, E. S.


Book ID
124061470
Publisher
The Electrochemical Society
Year
1997
Tongue
English
Weight
555 KB
Volume
144
Category
Article
ISSN
0013-4651

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Dissolution of silicon and junction deli
โœ T.L. Chu; J.R. Gavaler ๐Ÿ“‚ Article ๐Ÿ“… 1965 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 611 KB

The dissolution of single crystal silicon by aqueous solutions' of hydrofluoric acid and chromium (VI) oxide was studied as a function of the resistivity of silicon and the composition of the etchant . In the concentration range under study, the dissolution rate is dependent on the resistivity of th