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Cascade processes in a plasma oscillator

✍ Scribed by M. A. Krasil’nikov; M. V. Kuzelev; A. A. Rukhadze


Book ID
110145328
Publisher
Springer
Year
1997
Tongue
English
Weight
165 KB
Volume
85
Category
Article
ISSN
1063-7761

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Optical Emission Spectroscopy (OES) was used to identify reactive species and their excitation states in low-temperature cascade arc plasmas of N 2 , CF 4 , C 2 F 4 , CH 4 , and CH 3 OH. In a cascade arc plasma, the plasma gas (argon or helium) was excited in the cascade arc generator and injected i