Carrier mobility enhancement versus channel direction in highly-doped Si

✍ Scribed by Qin, Shu; Prussin, Si; Reyes, Jason; Hu, Y. Jeff; McTeer, Allen

• Book ID: 123315604
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 881 KB
• Volume: 229
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/j.surfcoat.2012.03.072