✦ LIBER ✦
Carbonaceous overlayer and near-surface damage after pure CF4 reactive ion beam etching of silicon: Exposure dose effects
✍ Scribed by C. Lejeune; J.P. Grandchamp; J.P. Gilles; E. Collard; P. Scheiblin
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 607 KB
- Volume
- 36
- Category
- Article
- ISSN
- 0169-4332
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