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Carbon nanotubes initiate the explosion of porous silicon

โœ Scribed by Christopher D. Malec; Nicolas H. Voelcker; Joseph G. Shapter; Amanda V. Ellis

Book ID
113793860
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
675 KB
Volume
64
Category
Article
ISSN
0167-577X

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## Abstract Carbonโ€nanotubeโ€templated microfabrication (CNTโ€M) of porous materials is demonstrated. Partial chemical infiltration of 3D carbonโ€nanotube structures with silicon results in a mechanically robust material, structured from the 10 nm scale to the 100 ฮผm scale. The nanoscale dimensions ar