Carbon doping and etching of MOCVD-grown GaAs, InP, and related ternaries using CC14

✍ Scribed by A.E. Kibbler; Sarah R. Kurtz; J.M. Olson

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 484 KB
• Volume: 109
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(91)90187-a