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Carbon based Si- and Cr-containing thin films: Chemical and nanomechanical properties

✍ Scribed by I. Bertóti; M. Mohai; K. Kereszturi; A. Tóth; E. Kálmán

Book ID
113913694
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
650 KB
Volume
11
Category
Article
ISSN
1293-2558

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In this investigation, nanoindentation, nanoscratch and nanowear tests were done in order to study the nanomechanical and nanotribological properties of the chromium carbide nanostructured thin films. Chromium carbide films were synthesized by rf sputtering from a Cr 3 C 2 target on magnesium oxide