Carbon and composite carbon-metal films deposited in an rf glow discharge operated in organic gases : H. Biederman, L. Martinu and J. Zemek. Vacuum35 (10–11), 447 (1985)

• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 128 KB
• Volume: 27
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(87)90717-7