Capacitive pressure sensors and switches fabricated using strain compensated SiGeB

✍ Scribed by S. Chatzandroulis; S. Koliopoulou; D. Goustouridis; D. Tsoukalas

• Book ID: 108207574
• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 160 KB
• Volume: 83
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2006.01.048