Capacitive humidity sensors in SACMOS technology with moisture absorbing photosensitive polyimide

✍ Scribed by T. Boltshauser; H. Baltes

• Book ID: 108028072
• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 530 KB
• Volume: 26
• Category: Article
• ISSN: 0924-4247
• DOI: 10.1016/0924-4247(91)87041-z