Capacitance and doping profiles of ion-implanted, buried-channel MOSFETS : G. Lubberts and B. C. Burkey. Solid-St. Electron. 22, 47 (1979)

• Publisher: Elsevier Science
• Year: 1979
• Tongue: English
• Weight: 157 KB
• Volume: 19
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(79)90330-5