✦ LIBER ✦
Cancellation of the parasitic feedthrough current in an integrated CMOS–MEMS clamped-clamped beam resonator
✍ Scribed by Giner, Joan; Uranga, Arantxa; Marigò, Eloi; Muñoz-Gamarra, Jose Luis; Colinet, Eric; Barniol, Nuria; Arcamone, Julien
- Book ID
- 121896945
- Publisher
- Elsevier Science
- Year
- 2012
- Tongue
- English
- Weight
- 616 KB
- Volume
- 98
- Category
- Article
- ISSN
- 0167-9317
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