✦ LIBER ✦

CAMP-6, a deep-UV positive tone resist applied to E-beam exposure

✍ Scribed by Magdalena Hintermaier; Hermann Anzinger; Erwin Knapek

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Evaluation of a positive tone chemically

✍ Peter Zandbergen; Han J. Dijkstra 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 417 KB

E-beam and RIE examination of chemically

✍ P. Hudek; I.W. Rangelow; I.S. Daraktchiev; I. Kostič 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 983 KB