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Calibration of sputtering yields for AES depth profiling of oxide layers on aluminium by means of carrier-gas heat extraction analysis

✍ Scribed by T. F. Chen; R. P. H. Garten; E. Grallath; H. Bubert; H. Jenett


Book ID
112323438
Publisher
Springer
Year
1987
Tongue
English
Weight
973 KB
Volume
329
Category
Article
ISSN
1618-2650

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