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Calibration of scanning electron microscopes for measuring the dimensions of submicron relief elements

✍ Scribed by Yu. A. Novikov; S. V. Peshekhonov; A. V. Rakov; A. N. Simonov; I. Yu. Stekolin; I. B. Strizhkov; V. V. Tsybul'skii

No coin nor oath required. For personal study only.

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