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Calibration of a white light interferometer for the measurement of micro-scale dimensions

โœ Scribed by Carlo Ferri; Julian Faraway; Emmanuel Brousseau

Book ID
105853237
Publisher
Springer
Year
2009
Tongue
English
Weight
386 KB
Volume
47
Category
Article
ISSN
0268-3768

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Shape measurements of engineering surfaces are an interesting and important application for white-light interferometry (WLI). Due to some factors such as: (a) the high-processing speed, (b) the ability to measure a huge quantity of points of the evaluated surface, and (c) the non-contacting nature;