✦ LIBER ✦
Calculation of sputtering ion pump speed: W Ho R K Wong and T P Keng, J Vac Sci Technol, 20 (4), 1982, 1010–1013
- Publisher
- Elsevier Science
- Year
- 1983
- Tongue
- English
- Weight
- 172 KB
- Volume
- 33
- Category
- Article
- ISSN
- 0042-207X
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