C49–C54 phase transition in nanometric titanium disilicide nanograins

✍ Scribed by M.S Alessandrino; M.G Grimaldi; F La Via

• Book ID: 104305739
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 389 KB
• Volume: 64
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(02)00786-4

✦ Synopsis

The first order C49-C54 phase transition was studied in single TiSi grains embedded in a Si matrix by 2 transmission electron microscopy and X-ray diffraction. The fraction of material transformed into C54 was determined at different times during the annealing in the 700-1100 8C temperature range. The fraction of C54 increases with temperature and the steady state value is reached in times of | 60 s. The data are interpreted in terms of heterogeneous nucleation at the silicide-silicon interface.