“Burst” technology with feedback-loop control for capacitive detection and electrostatic excitation of resonant silicon sensors

✍ Scribed by Corman, T.; Noren, K.; Enoksson, P.; Melin, J.; Stemme, G.

• Book ID: 114538336
• Publisher: IEEE
• Year: 2000
• Tongue: English
• Weight: 192 KB
• Volume: 47
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/16.877188