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Bulk-wave and guided-wave photoacoustic evaluation of the mechanical properties of aluminum/silicon nitride double-layer thin films

✍ Scribed by Feifei Zhang; Sridhar Krishnaswamy; Carmen M. Lilley


Book ID
108292013
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
297 KB
Volume
45
Category
Article
ISSN
0041-624X

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