Bulk micromachining of silicon in TMAH-based etchants for aluminum passivation and smooth surface

✍ Scribed by K. Biswas; S. Das; D.K. Maurya; S. Kal; S.K. Lahiri

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 424 KB
• Volume: 37
• Category: Article
• ISSN: 0026-2692
• DOI: 10.1016/j.mejo.2005.05.013