Bulk etch rate estimation of LR-115 SSNTD using PHOENIX interface

✍ Scribed by Rati Varshney; R.G. Sonkawade; Monika Gupta; R.P. Chauhan; A.K. Mahur; K. Kant; A. Parveen; S.K. Chakarvarti

• Book ID: 108256451
• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 388 KB
• Volume: 46
• Category: Article
• ISSN: 1350-4487
• DOI: 10.1016/j.radmeas.2011.02.007