✦ LIBER ✦
Built in mask (BIM) : A new way to a submicron process with high resolution and good latitude
✍ Scribed by F.A. Vollenbroek; W.P.M. Nijssen; M.J.H.J. Geomini; C.M.J. Mutsaers; R.J. Visser
- Publisher
- Elsevier Science
- Year
- 1987
- Tongue
- English
- Weight
- 356 KB
- Volume
- 6
- Category
- Article
- ISSN
- 0167-9317
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