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Buckle formation in vacuum-deposited thin films

✍ Scribed by H.Y. Yu; C. Kim; S.C. Sanday


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
711 KB
Volume
196
Category
Article
ISSN
0040-6090

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## Abstract The influence of the electrochemical potential and deposition mode on the preferred orientation, morphology and microstructure of crystallites in electrochemically deposited (ECD) copper thin films was investigated using X‐ray diffraction (XRD), scanning electron microscopy (SEM) and th