Brush seal assembly and method of making

• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 125 KB
• Volume: 2009
• Category: Article
• ISSN: 1350-4789
• DOI: 10.1016/s1350-4789(09)70041-8

✦ Synopsis

Applied Materials Inc, USA This patent refers to equipment used in the manufacture of flat panel displays. As these are manufactured in larger sizes the sealing of the doors to the vacuum chambers required in the process presents a challenge. Apparatuses and methods are provided for sealing a slit valve passage. After the two components of the slit door are closed together the sealing force may be adjusted by varying the gas pressure to the seal depending on pressure conditions in the process chambers.