✦ LIBER ✦
Broad-band extreme ultraviolet lithography with a wet-silylated and dry-developed resist
✍ Scribed by Hiroaki Oizumi; Yoshio Yamashita; Masayuki Ohtani
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 576 KB
- Volume
- 30
- Category
- Article
- ISSN
- 0167-9317
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