✦ LIBER ✦
Breaking the feature sizes down to sub-22 nm by plasmonic interference lithography using dielectric-metal multilayer
✍ Scribed by Yang, Xuefeng; Zeng, Beibei; Wang, Changtao; Luo, Xiangang
- Book ID
- 115412266
- Publisher
- Optical Society of America
- Year
- 2009
- Tongue
- English
- Weight
- 213 KB
- Volume
- 17
- Category
- Article
- ISSN
- 1094-4087
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