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Breakdown spots of ultra-thin (EOT&#xa0;<&#xa0;1.5&#xa0;nm) HfO2/SiO2 stacks observed with enhanced—CAFM

✍ Scribed by X. Blasco; M. Nafrı́a; X. Aymerich; J. Pétry; W. Vandervorst


Book ID
108210534
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
235 KB
Volume
45
Category
Article
ISSN
0026-2714

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