Boundary conditions for formation of Er–O optical centers in Er- and O-coimplanted Si

✍ Scribed by Kenshiro Nakashima; Osamu Eryu; Akikazu Saito; Toshitake Nakata; Masanori Watanabe

• Book ID: 114170729
• Publisher: Elsevier Science
• Year: 1999
• Tongue: English
• Weight: 171 KB
• Volume: 148
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(98)00782-4