Bottom-gate poly-Si thin film transistors using XeCl excimer laser annealing and ion doping techniques

✍ Scribed by Furuta, M.; Kawamura, T.; Yoshioka, T.; Miyata, Y.

• Book ID: 114535243
• Publisher: IEEE
• Year: 1993
• Tongue: English
• Weight: 624 KB
• Volume: 40
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/16.239735