Borophosphosilicate glass for VLSI device fabrication : A. C. Sharp and J. Patel. Vacuum35 (10–11), 441 (1985)

• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 122 KB
• Volume: 27
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(87)90694-9