✦ LIBER ✦
Boron profile in implanted SiO2 on silicon substrate; comparison between theory and experiment
✍ Scribed by A. Essaid; A. Martinez; A.C.F. de Mattos; G. Sarrabayrouse
- Publisher
- Elsevier Science
- Year
- 1981
- Tongue
- English
- Weight
- 192 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0038-1101
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