Boron-Doped Si[sub 0.8]Ge[sub 0.2] Thin Film Deposited by Helicon Sputtering for Microthermoelectric Hydrogen Sensor

✍ Scribed by Tajima, Kazuki; Shin, Woosuck; Houlet, Lionel Fabrice; Itoh, Toshio; Izu, Noriya; Matsubara, Ichiro

• Book ID: 121679591
• Publisher: The Electrochemical Society
• Year: 2007
• Tongue: English
• Weight: 458 KB
• Volume: 154
• Category: Article
• ISSN: 0013-4651
• DOI: 10.1149/1.2388858