✦ LIBER ✦
Boron diffusion effects from p+ polysilicon gate in thin thermal oxide and plasma nitrided oxide
✍ Scribed by B. Piot; K. Barla; B. Garcin; A. Straboni
- Book ID
- 103598471
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 186 KB
- Volume
- 15
- Category
- Article
- ISSN
- 0167-9317
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