Electrochemical aspects of new materials
โ
Valery M. Dubin
๐
Article
๐
2003
๐
Elsevier Science
๐
English
โ 371 KB
Major scaling issues, which need to be addressed to continue scaling according to Moore's law, include increase of 2 transistor leakage due to use of thin gate oxide (about 1 nm limit for SiO ), power (reaching 100 W/ cm ) and RC delay 2 (dielectric constant limit is 1 for air and Cu resistivity inc