Book Review: Analysis of Polymers. An Introduction By T. R. Crompton

✍ Scribed by J. H. Wendorff

• Publisher: John Wiley and Sons
• Year: 1989
• Tongue: English
• Weight: 135 KB
• Volume: 28
• Category: Article
• ISSN: 0044-8249
• DOI: 10.1002/anie.198915951

✦ Synopsis

measurement of opaque-film thickness by thermal waves intelligent laser soldering inspection and process control rupture testing of electrodeposited copper interconnections (is this a non-destructive evaluation?) -heterodyne holographic interferometry and -"whole wafer" scanning electron microscopy.

The last four papers apparently only consist of copies of view graphs used for presentation at the workshop. The main part of the book describes activities at some companies and universities in 1986 in the area of measurement technology and process control in semiconductor manufacturing.