✦ LIBER ✦
Bonding of fluorine-implanted and annealed silicon : L. E. Mosley, M. A. Paesler, G. Lucovsky, A. Waltiner and J. J. Wortman. Solid St. Commun. 53 (6) 513 (1985)
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 128 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0026-2714
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