✦ LIBER ✦
Bombardment Induced Strengthening Of Nitride (BISON) a novel effect in the etch properties of ion implanted LPCVD - Si3N4
✍ Scribed by A.H. van Ommen; H.G.R. Maas; J.A. Appels
- Book ID
- 103889064
- Publisher
- Elsevier Science
- Year
- 1985
- Weight
- 146 KB
- Volume
- 129
- Category
- Article
- ISSN
- 0378-4363
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