Patterning a nanowell sensor biochip for
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Sungkyu Seo; Maria Dobozi-King; Ryland F. Young; Laszlo B. Kish; Mosong Cheng
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Article
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2008
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Elsevier Science
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English
β 539 KB
This paper presents the fabrication process of a SEPTIC (SEnsing of Phage-Triggered Ion Cascades) chip, consisting of two Ti contact pads and a 150 nm wide Ti nanowell device on LiNbO 3 substrate. The patterning was fulfilled by combining electron beam lithography, contact photolithography and react