Bio-mass sensor using an electrostatically actuated microcantilever in a vacuum microchannel

✍ Scribed by Yasser Aboelkassem; Ali H. Nayfeh; Mehdi Ghommem

• Book ID: 111707294
• Publisher: Springer-Verlag
• Year: 2010
• Tongue: English
• Weight: 367 KB
• Volume: 16
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-010-1087-8