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Bias-graded deposition of diamond-like carbon for tribological applications

✍ Scribed by Zhang, Sam; Bui, Xuan Lam; Fu, Yongqing; Butler, David L.; Du, Hejun

Book ID
120554153
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
105 KB
Volume
13
Category
Article
ISSN
0925-9635

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Cathodic arc deposition of diamond-like
Cathodic arc deposition of diamond-like carbon: effect of bias voltage and deposition angle
✍ B. Rother; J. Siegel; I. MΓΌhling; H. Fritzsch; K. Breuer πŸ“‚ Article πŸ“… 1991 πŸ› Elsevier Science 🌐 English βš– 265 KB

The highly ionized, atomic particle flux of a cathodic arc discharge was applied to the fast rate deposition of carbon coatings at bias voltages fom 0 to -400 V and at deposition angles of 0 Β°, 30 Β° and 60 Β°. The structure of the coating material grown directly from the ion flux was investigated by