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Bias enhanced deposition of highly oriented β-SiC thin films using low pressure hot filament chemical vapour deposition technique

✍ Scribed by V.C George; A Das; M Roy; A.K Dua; P Raj; D.R.T Zahn


Book ID
108388499
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
205 KB
Volume
419
Category
Article
ISSN
0040-6090

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