Bias enhanced deposition of highly oriented β-SiC thin films using low pressure hot filament chemical vapour deposition technique

✍ Scribed by V.C George; A Das; M Roy; A.K Dua; P Raj; D.R.T Zahn

• Book ID: 108388499
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 205 KB
• Volume: 419
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/s0040-6090(02)00789-7